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e-Vap 10kW Large Rotary Pocket Source

e-Vap® 10kW large rotary pocket electron beam evaporation sources are the perfect choice for production coating tools. The modular design makes service simple while maintaining perfect alignment every time. Advanced magnetics and high frequency sweep control provide the best material utilization in the industry. The proprietary magnetic system keeps the beam density constant throughout the evaporation process, producing extreme stability in both rate and uniformity.

  • Modular design
  • Water cooled
  • 7 to 30cc x 4-pocket configuration
  • 7 to 12cc x 6-pocket configuration
  • 150cc carousel pocket

e-Vap® 10kW Large Rotary Pocket Source

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Maximum Power 7cc to 15cc 6kW – Crucible and material dependent
Maximum Power 25cc to 150cc 10kW – Crucible and material dependent
Operating Voltage -6kV to -10kV
Beam Current Zero to 1A
Water Flow 3.0 gpm @ 65 psi
XY sweep 0-200 Hz
Size 3.20″L x 5.62″W x 3.25″H
Weight 27 lbs
Vacuum High Vacuum version to: 2x10E-8 Torr UHV version: to 2x10E-11 Torr

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