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UHV Series

Precision rotary motion feedthroughs are low backlash instruments with a display resolution of 0.1 °. Welded stainless steel bellows, a unique off-axis wobble design and the use of rotary shaft bearing supports provide long life and smooth operation. Feedthroughs are available on Conflat® compatible CF metal seal flanges. Motorization option is available. Motor controls must be purchased separately.

  • Continuous rotary motion
  • Manual or motorized actuator
  • Rotary position lock
  • UHV-compatible materials
  • Welded bellows seal
  • Bakeable to 230°C'
  • DN40CF port mount
  • Low backlash design

Presicion-UHV series

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Flange / actuator body 304ss/ Anodized aluminium
Shaft seal/piston seal AM 350 welded bellows
Vacuum range UHV/HV 1.3x10-11mbar
Temperature range -20°C to 230°C
Torque 0.79 Nm maximum
Axial load 2.3 kg
Lateral load 4.5 kg
Weight and dimensions See table

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