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Triple Axis, Standard XYZ

  • 4 to 12 inch Z-axis travel
  • Plus or minus 1/2 and 1 inch off center XY motion
  • 1-1/2, 2-1/2 and 4 inch bore diameters
  • Manual or Motorized actuators
  • UHV compatible materials
  • Welded bellows seal
  • Bakeable to 230ºC
  • Del-Seal™ CF port mounts

Standard XYZ stages are large bore stages which incorporate triple axis motion in a single stage. The XY travels are micrometer driven and guided by cross roller bearing slides. MDC micrometers have unique laser etched plus-minus scales that indicate positive or negative port displacement and are available with either 0.50" or 1.00" of linear XY displacement. The Z axis employs a handwheel and worm gear reduction drive mechanism with displacement measured along the stage's frame mounted machinist's scale. Z axis linear travels of up to 12" are available. MDC standard stages provide precise sample motion and manipulation of samples inside ultrahigh vacuum environments. They are fitted with industry standard Conflat® compatible Del-Seal™ CF port flanges.

  Flange  304ss
  Actuator body Anodized aluminum
  Bellows AM 350
 Vacuum Range  1x10-11 Torr
 Temperature Range* -20ºC to 230ºC
* Units are bakeable to 30ºC maximum when motorized.
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This product references the following part numbers: 678010, 678011, 678012, 678013, 678018, 678019, 678020, 678021, 678026, 678027, 678028, 678029, 678034, 678035, 678036, 678037, 678042, 678043, 678044, 678045