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Triple Axis, Compact XYZ

  • 2 or 4 inch Z-axis travel
  • Plus or minus 1/2 inch off center XY motion
  • 1-1/2 and 2-1/2 inch bore diameters
  • Manual or Motorized actuators
  • UHV compatible materials
  • Welded bellows seal
  • Bakeable to 230ºC
  • Del-Seal™ CF port mounts

Compact triple axis XYZ stages have smaller footprints than VPlane® stages. They are a practical and economical solution for applications with limited space. Models with two and four inches of linear travel and bore diameter of 1.50" and 2.50" are available. The instruments precision Z drive employs a fine pitch lead screw mechanism with approximate positions measured along a graduated machinist's scale with both inch and millimeter units included. The XY axes are micrometer driven and guided by cross roller bearing slides. Micrometers have unique laser etched plus-minus scales that indicate positive or negative port displacement. MDC triple axis XY stages provide precise motion and manipulation of samples inside ultrahigh vacuum environments. Top and bottom port flanges are available in 2-3/4" and 4-1/2" Conflat® compatible, tapped Del-Seal™ CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all XYZ compact stages.

  Flange  304ss
  Actuator body Anodized aluminum
  Bellows AM 350
 Vacuum Range  1x10-11 Torr
 Temperature Range* -20ºC to 230ºC
* Units are bakeable to 30ºC maximum when motorized.
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