Triple Axis, Compact XYZ

Features
2 or 4 inch Z-axis travel Plus or minus 1/2 inch off center XY motion 1-1/2 and 2-1/2 inch bore diameters Manual or Motorized actuators UHV compatible materials Welded bellows seal Bakeable to 230ºC Del-Seal™ CF port mounts

Description
Compact triple axis XYZ stages have smaller footprints than VPlane® stages. They are a practical and economical solution for applications with limited space. Models with two and four inches of linear travel and bore diameter of 1.50" and 2.50" are available. The instruments precision Z drive employs a fine pitch lead screw mechanism with approximate positions measured along a graduated machinist's scale with both inch and millimeter units included. The XY axes are micrometer driven and guided by cross roller bearing slides. Micrometers have unique laser etched plus-minus scales that indicate positive or negative port displacement. MDC triple axis XY stages provide precise motion and manipulation of samples inside ultrahigh vacuum environments. Top and bottom port flanges are available in 2-3/4" and 4-1/2" Conflat® compatible, tapped Del-Seal™ CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all XYZ compact stages.

Specifications
Material
Flange	304ss
Actuator body	Anodized aluminum
Bellows	AM 350
Vacuum Range	1x10-11 Torr
Temperature Range*	-20ºC to 230ºC
* Units are bakeable to 30ºC maximum when motorized.
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This product references the following part numbers: 678004, 678005, 678006

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Triple Axis, Compact XYZ