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Single Axis, Compact Z

  • 1 to 4 inch Z-axis travel
  • 1/2, 1-1/2 and 2-1/2 inch bore diameters
  • Manual or Motorized actuator
  • UHV compatible materials
  • Welded bellows seal
  • Bakeable to 230ºC
  • Del-Seal™ CF port mounts

Compact single axis Z stages have smaller footprints than VPlane® and other stages. They are a practical and economical solution for applications with limited space. Models with one to four inches of linear travel and bore diameters from 0.50" to 2.50" are available. The instrument's precision drive employs a fine pitch lead screw mechanism. Approximate positions can be measured along a graduated machinist's scale with both inch and millimeter units included. Top and bottom port flanges are available in 1-1/3", 2-3/4" and 4-1/2" Conflat® compatible, tapped Del-Seal™ CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all compact stages.

  Flange / Body 304ss
  Bellows AM 350
 Vacuum Range  1x10-11 Torr
 Temperature Range* -20ºC to 230ºC
* Units are bakeable to 30ºC maximum when motorized.
For conversion tables click here

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This product references the following part numbers: 665501, 665503, 665505, 665520, 665522, 665523, 665524