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Home  > Vacuum Pumps > Vacuum Pumps > Turbomolecular Pumps > STPA2203C / XA2703C / XA3293C

STPA2203C / XA2703C / XA3293C

Edwards STP-A2203C is a turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A half rack controller gives additional space savings and incorporates DC drive technology for battery-free operation. The STP-A2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.

Features and Benefits
  • Compact design including a fully integrated controller
  • Innovative, self-sensing magnetic bearing system
  • Digital 5-axis control
  • Vibration levels reduced by 50% compared to the existing turbo pumps
  • Can be configured to run corrosive processes

Turbomolecular-pump Maglev Series(STP-A2203C)


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Specifications Table:
Inlet flange size
ISO100K/DN100CF
ISO100K/DN100CF
Pumping Speed:
N2
300 ls-1
450 ls-1
H2
450 ls-1
450 ls-1
Compression Ratios:
N2
>108
>108
H2
1x104
1x104
Ultimate pressure
6.5x10-6(5x10-8)
10-8(10-10)
Weight (kg)
15 kg
16 kg
Max working pressure
1.3 x 10-1 Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
less than 6 minutes
Mounting position
Any orientation
Cooling method
Natural cooling (Air cooling fan when baking or gas pumping)
Lubricating oil
Not necessary
Backing pump
240L min-1
Leakage Magnetic Flux
Axial direction
Less than 100 m/Gauss
Leakage Magnetic Flux
Radial direction
Less than 100 m/Gauss
Ambient temperature range
0 to 40 °C
Storage temperature range
-25 to 55 °C

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Drawings download if available are indicated by in the Part Number column. Click on this icon to view all downloads.
Literature downloads (including manuals), if available, is indicated by in the Part Number column. Click on this icon to view all available product literature and to download a PDF copy.

This product references the following part numbers: B75030010-01, B75030020, YT4V0Z002, YT4V0Z003, YT660Z050, YT660Z080, YT660Z140, YT6610010, YT76Z0Z00

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