Our website detected you are using an older version of Microsoft Internet Explorer browser. We recommend that you use Google Chrome, Mozilla FireFox or Microsoft Edge.
Edwards STP-A2203C is a turbomolecular pump designed for use in semiconductor applications. It has
advanced rotor technology that gives class-leading performance for maximum process flexibility. A half rack controller gives additional space savings
and incorporates DC drive technology for battery-free
operation. The STP-A2203C has been approved for use
by major etch, ion implant and deposition equipment
manufacturers in the semiconductor and magnetic media
industries.
Features and Benefits
Compact design including a fully integrated controller
Innovative, self-sensing magnetic bearing system
Digital 5-axis control
Vibration levels reduced by 50% compared to the existing turbo pumps
Can be configured to run corrosive processes
Turbomolecular-pump Maglev Series(STP-A2203C)
Click image to enlarge
Click drawing to enlarge
Specifications Table:
Inlet flange size
ISO100K/DN100CF
ISO100K/DN100CF
Pumping Speed:
N2
300 ls-1
450 ls-1
H2
450 ls-1
450 ls-1
Compression Ratios:
N2
>108
>108
H2
1x104
1x104
Ultimate pressure
6.5x10-6(5x10-8)
10-8(10-10)
Weight (kg)
15 kg
16 kg
Max working pressure
1.3 x 10-1 Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
less than 6 minutes
Mounting position
Any orientation
Cooling method
Natural cooling (Air cooling fan when baking or gas pumping)
Drawings download if available are indicated by in the Part Number column. Click on this icon to view all downloads. Literature downloads (including manuals), if available, is indicated by in the Part Number column. Click on this icon to view all available product literature and to download a PDF copy.
Please select your country in order to have the best shopping experience on our website. Your country selection will determine what product catalog you see, the currency, and other information that pertains to your exact location. For the best service, it is very important that you select the correct country.
Submitting Please Wait..
If you choose to login or create an account, then the website country mode you will be shown will be based off of the country you entered in your account contact information. You can edit your country in your account contact information at any time.
Login
User name is required
Password is required
Create Account
Login Information
Email is required.
Password is required.
Password is required.
Contact Information
Password is required.
required
required
required
required
required
required
required
required
required
required
required
Please help us to better serve your needs by indicating which area within each of the following 3 categories best describes your Industry profile.
Password is required.
Password is required.
Password is required.
Note: Billing, Shipping and Payment Information is collected during order submission.
Privacy Policy *
Do you accept the terms of our Privacy Policy? - Review here