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Edwards STP-A2203C is a turbomolecular pump designed for use in semiconductor applications. It has
advanced rotor technology that gives class-leading performance for maximum process flexibility. A half rack controller gives additional space savings
and incorporates DC drive technology for battery-free
operation. The STP-A2203C has been approved for use
by major etch, ion implant and deposition equipment
manufacturers in the semiconductor and magnetic media
Features and Benefits
Compact design including a fully integrated controller
Innovative, self-sensing magnetic bearing system
Digital 5-axis control
Vibration levels reduced by 50% compared to the existing turbo pumps
Can be configured to run corrosive processes
Turbomolecular-pump Maglev Series(STP-A2203C)
Click image to enlarge
Click drawing to enlarge
Inlet flange size
Max working pressure
1.3 x 10-1 Pa
Allowable backing pressure
less than 6 minutes
Natural cooling (Air cooling fan when baking or gas pumping)
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