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Pneumatic Shutter Three Position

Pneumatic shutters are an excellent tool for precise control of film thickness onto a substrate. The air actuated shutter masks off the vapor stream between source and substrate at the beginning and finishing stages of the evaporation/ deposition cycle. The shutter also allows pre-melt or "soak" prior to deposition by blanketing the evaporation material. A three position shutter offers greater process flexibility than other shutters. In position one the shutter will close the deposition and rate monitoring ports on a horizontal e-Vap® system fitted with a water-cooled roof. In position two the shutter continues to block the deposition port, but opens the rate monitoring port. In position three all ports are open and the system is ready to begin a coating cycle. This shutter includes a 120VAC solenoid air control valve.

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