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UHV Series

Port aligners are adjustable port flange interfaces that provide motion instruments with angular tilt and axial shift. They can also be used to correct mate-up between components with minor alignment imperfections.

Load-lock gimbals are unique port alignment instruments specifically designed for the precision alignment of magnetically coupled transporters as used with circular and rectangular entry load-lock systems. Load-lock gimbal port aligners are fitted with precision micrometer adjustments for both horizontal tilt (above and below a horizontal plane of travel) and side to side parallel axis displacement. Load- lock gimbals are intended for horizontal installation with its tilt adjustment micrometer at a bottom 6 o'clock position. They include a stainless steel formed bellows adaptor which mates between the magnetic transporter and the sample staging chamber. A transporter shaft extension kit to compensate for the increase in the transporters overall length is also included.

Features
  • 10° horizontal tilt
  • 3.2mm axial displacement
  • Micrometer actuators with position lock
  • Formed bellows seal
  • Bakeable to 200°C
  • CF port mounts
  • Includes magnetic transporter extension kit
Port aligners -Load-lock gimbal


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Specifications:
Material  
Flange 304 Stainless steel
Body Anodized aluminium
Bellows, formed 316 Stainless steel
Vacuum range 1x10-11mbar
Temperature range -20°C to 200°C
Weight and dimensions See table

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