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UHV Series

Compact triple axis XYZ stages have smaller footprints than V-Plane® stages. They are a practical and economical solution for applications with limited space. Models with 5O and 100mm of linear travel and bore diameter of 38.1 and 63.5mm are available. The instruments precision Z drive employs a fine pitch lead screw mechanism with approximate positions measured along a graduated machinist's scale with both inch and millimetre units included. The XY axes are micrometer driven and guided by cross roller bearing slides. Micrometers have unique laser-etched plus-minus scales that indicate positive or negative port displacement. Caburn triple axis XY stages provide precise motion and manipulation of samples inside ultra-high vacuum environments. Top and bottom port flanges are available in DN40 and DN63-compatible, tapped CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all XYZ compact stages.

Features
  • 50 or 102mm Z-axis travel
  • Plus or minus 13mm off-centre XY motion
  • 38 and 63mm bore diameters
  • Manual or motorized actuators
  • UHV-compatible materials
  • Welded bellows seal
  • Bakeable to 230°C'
  • CF port mounts
Triple axis-Compact XYZ stage-UHV Series


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Specifications:
Material  
Flange / Body 304 Stainless steel
Bellows AM 35O
Vacuum range 1x10" mbar
Temperature range' -20°C to 230°C
Weight and dimensions See table


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