Need help? Contact us at (800) 443-8817

Insulator Seal Summer Sale 2019 - 20% Off Select Power and Coaxial Feedthroughs, and Viewports! Sale Discount Prices are Shown in "Net Price" Field and Automatically Applied to Your Cart at Checkout.

Home  > Motion & Manipulation > Manipulation > Tripple axis Compact XYZ Stage > UHV Series

Product Listing

UHV Series

Compact triple axis XYZ stages have smaller footprints than V-Plane® stages. They are a practical and economical solution for applications with limited space. Models with 5O and 100mm of linear travel and bore diameter of 38.1 and 63.5mm are available. The instruments precision Z drive employs a fine pitch lead screw mechanism with approximate positions measured along a graduated machinist's scale with both inch and millimetre units included. The XY axes are micrometer driven and guided by cross roller bearing slides. Micrometers have unique laser-etched plus-minus scales that indicate positive or negative port displacement. Caburn triple axis XY stages provide precise motion and manipulation of samples inside ultra-high vacuum environments. Top and bottom port flanges are available in DN40 and DN63-compatible, tapped CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all XYZ compact stages.

  • 50 or 102mm Z-axis travel
  • Plus or minus 13mm off-centre XY motion
  • 38 and 63mm bore diameters
  • Manual or motorized actuators
  • UHV-compatible materials
  • Welded bellows seal
  • Bakeable to 230°C'
  • CF port mounts
Triple axis-Compact XYZ stage-UHV Series

Click image to enlarge

Click image to enlarge

Flange / Body 304 Stainless steel
Bellows AM 35O
Vacuum range 1x10" mbar
Temperature range' -20°C to 230°C
Weight and dimensions See table

For any question on this Section Ask Our Experts

Drawings download if available are indicated by in the Part Number column. Click on this icon to view all downloads.
Literature downloads (including manuals), if available, is indicated by in the Part Number column. Click on this icon to view all available product literature and to download a PDF copy.