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Compact single axis Z stages have smaller footprints than V-Piane® and other stages. They are a practical and economical solution for applications with limited space. Models with 25.4 to I 0 1.6mm of linear travel and bore diameters from 12.7 to 63.5mm are available. The instrument's precision drive employs a fine pitch lead screw mechanism.Approximate positions can be measured along a graduated machinist's scale with both inch and millimetre units included. Top and bottom port flanges are available in DN 16CF, DN40CF and DN63CF compatible, tapped CF metal seal flanges. Edge welded stainless steel bellows are used to connect the port flanges on all compact stages.

  • 360° continuous rotary positioning
  • Manual or motorized actuator
  • Rotary position lock
  • Differentially pumped, dual PTFE elastomer seals
  • UHV-compatible materials
  • Bakeable to 230°C'
  • CF port mounts
Single Axis Compact Z-stage -CF

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Flange 304 Stainless steel
Actuator body Anodized aluminium
Gasket seals PTFE
Vacuum range  
HV Applications 1x10 5 mbar
UHV Applications Differentially pumped to 1x10' m bar
Temperature range' -20°C to 200°C
Weight and dimensions See table

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