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UHV

VPS Series rotary viewport shuttersprovide quick and efficient shielding for standardviewports. These shutters are ideally suited for service in high and ultrahigh vacuum coating applications. They are swing-type, pivoting shutters that are mounted between viewports and chamber port flanges. The shape of each shutter has been designed to maximize its aperture into a standard tubed port. The actual amount of shutter swing will be dependent on the mating chamber port's tube diameter.

The table below gives the maximum swing angle for shutters mounted on Caburn-MDC half-nipples fitted with standard CF metal seal flanges with corresponding tube diameters. To provide maximum shielding of viewports, each shutter body has a step machined to match the shape and contour of the shutter's flap. Actuation of the shutter is provided through an MDC bellows sealed rotary drive. Improved design features include all stainless steel body allowing for bakeout up to 230°C.A positive click-stop action has also been added to the rotary driver that allows for partial opening of the shutter's flapper plate between the fully opened and fully closed positions. Shutter path must be unobstructed during actuation as shutter mechanism can be damaged when shutter is forced beyond a clear and unobstructed travel path, such as smaller tube diameters.

Features
  • 100% viewport shielding
  • Double-sided flange mount
  • CF metal seal interface
  • Actuated with bellows sealed rotary feedthrough
  • All stainless steel construction
  • Four flange sizes
  • Bakeable to 200°C

  • Viewport-Shutter-accessories


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