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Home  > Thin Film Deposition > Modular Evaporation Systems > Individual Source > Frame-6 - Extra Large, Rotary Pocket

Product Listing

Frame-6 - Extra Large, Rotary Pocket

Source Size Extra-Large
Source Type Rotary Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket: 4x... 40, 60 & 75cc, 6x 25, 40cc
Carousel 360º 400cc
Combination Custom designs available
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 50,000Å/min @15kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  8.50L x 6.87W x 3.50H
For conversion tables click here

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