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Frame-5 - Large, HV & UHV Rotary Pocket



Specifications
Source Size Large
Source Type HV Rotary Pocket
Maximum Power 10kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket : 4x... 15, 25 & 30cc, 6x 12cc
Carousel 360º 150cc
Combination Custom designs available
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 30,000Å/min @10kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  6.20L x 5.62W x 3.25H
For conversion tables click here

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