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Frame-4 - Small, UHV Rotary Pocket



Specifications
Source Size Small
Source Type UHV Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume Multi-Pocket  4x 6cc
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  200ºC
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow 1.5GPM or 65PSIG inlet-outlet differential
Dimensions  8.37L x 5.37W x 3.37H
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