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Frame 1- Small, Fixed Pocket



Specifications
Source Size Small
Source Type Fixed Pocket
Maximum Power See Table
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume Single-Pocket  7, 15, 25 & 40cc
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 50,000Å/min @14kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  200ºC
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  6.60L x 4.90W x 2.10H
For conversion tables click here

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