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STPA2203C / XA2703C / XA3293C

Edwards STP-A2203C is a turbomolecular pump designed for use in semiconductor applications. It has advanced rotor technology that gives class-leading performance for maximum process flexibility. A half rack controller gives additional space savings and incorporates DC drive technology for battery-free operation. The STP-A2203C has been approved for use by major etch, ion implant and deposition equipment manufacturers in the semiconductor and magnetic media industries.

Features and Benefits
  • Compact design including a fully integrated controller
  • Innovative, self-sensing magnetic bearing system
  • Digital 5-axis control
  • Vibration levels reduced by 50% compared to the existing turbo pumps
  • Can be configured to run corrosive processes

Turbomolecular-pump Maglev Series(STP-A2203C)


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Specifications Table:
Inlet flange size
ISO100K/DN100CF
ISO100K/DN100CF
Pumping Speed:
N2
300 ls-1
450 ls-1
H2
450 ls-1
450 ls-1
Compression Ratios:
N2
>108
>108
H2
1x104
1x104
Ultimate pressure
6.5x10-6(5x10-8)
10-8(10-10)
Weight (kg)
15 kg
16 kg
Max working pressure
1.3 x 10-1 Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
less than 6 minutes
Mounting position
Any orientation
Cooling method
Natural cooling (Air cooling fan when baking or gas pumping)
Lubricating oil
Not necessary
Backing pump
240L min-1
Leakage Magnetic Flux
Axial direction
Less than 100 m/Gauss
Leakage Magnetic Flux
Radial direction
Less than 100 m/Gauss
Ambient temperature range
0 to 40 °C
Storage temperature range
-25 to 55 °C

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