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STPH301C / H451C / A803C / A1303C / A1603C

Edwards high performance STPH301C turbomolecular pump has been designed for use in the harshest of semiconductor applications. The pumps field proven reliability and class-leading performance give maximum process flexibility. The STPH301C has been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

Features and Benefits
  • Advanced Rotor Technology
  • Advanced Controller Design
  • Compact Design
  • 5 Axis Magnetic Suspension System

STPH301C Turbomolecular Vacuum Pump


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Click image to enlarge

Specifications Table:
Inlet flange size
ISO100K
Pumping Speed:
N2
300 ls-1
H2
200 ls-1
Compression Ratios:
N2
>108
H2
1x104
Ultimate pressure
6.5x10-6(5x10-8)
Weight (kg)
15 kg
Max working pressure
1.3 x 10-1 Pa
Allowable backing pressure
67 Pa
Rated speed
55000 rpm
Starting time
less than 6 minutes
Mounting position
Any orientation
Cooling method
Natural cooling (Air cooling fan when baking or gas pumping)
Lubricating oil
Not necessary
Backing pump
240L min-1
Leakage Magnetic Flux
Axial direction
Less than 100 m/Gauss
Leakage Magnetic Flux
Radial direction
Less than 100 m/Gauss
Ambient temperature range
0 to 40 °C
Storage temperature range
-25 to 55 °C

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