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STP603/603C

Edwards rotor technology gives class-leading performance for maximum process flexibility. Both pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

The STP603 and corrosion resistant STP603C are turbomolecular pumps designed for use in the most advanced semiconductor applications.

Features:
  • Advanced rotor technology:Maximised process flexibility, Oil free,Low vibration, High reliability,
    Maintenance free, Harsh process compatible (C version),
    Increased life
  • Advanced controller design: Auto tuning,Self diagnostic functions, DC motor drive ?
    Battery free operation
  • Compact design:Small footprint and half rack controller

STP Maglev (STP600 to STP1000) Series


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