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Product Listing

STP603/603C

Edwards rotor technology gives class-leading performance for maximum process flexibility. Both pumps have been approved for use by major equipment manufacturers in the semiconductor and magnetic media industries.

The STP603 and corrosion resistant STP603C are turbomolecular pumps designed for use in the most advanced semiconductor applications.

Features:
  • Advanced rotor technology:Maximised process flexibility, Oil free,Low vibration, High reliability,
    Maintenance free, Harsh process compatible (C version),
    Increased life
  • Advanced controller design: Auto tuning,Self diagnostic functions, DC motor drive ?
    Battery free operation
  • Compact design:Small footprint and half rack controller

STP Maglev (STP600 to STP1000) Series


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Specifications Table:
Pump Model STP603 /STP603C STPA803C STP1003/STP1003C
Max Gas Throughput— N2
(mbar*l/sec.)
N/A
N/A
N/A
Pumping Speed
L/sec (cfm)
650
800
1000
Compression Ratios
N2: 1.0 x 108
H2: 1.0 x 105
N2: 1.0 x 108
H2: 1.0 x 103
N2: 1.0 x 108
H2: 1.0 x 105
Ult. Pressure
Torr (mBar)
10-10
(5E-8 for
C version)
10-9
(10-9)
10-9
(10-9)
Inlet Flange
8" CF (DN160CF)
8" CF (DN160CF)
10" CF (DN200CF)
Foreline Flange
KF40
KF40
KF40
Max. Foreline Press.
Torr (mbar)
N/A
2
0.1
Orientation
Any
Any
Any
Cooling Method
Natural Convection
(water cooling optional)
Water
Natural Convection
(water cooling optional)
Weight lbs (kg)
68.4
(31)
86
(39)
68.4
(31)

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