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R601 13.56MHz 600W RF Power Supply

The RX01 series RF power supply package is a complete 13.56MHz RF package, including generator, AT auto-matching network, MC-2 control panel along with all cables and interlock connectors. These packages are conservatively rated and are CE marked, making them suitable for global RF sputter deposition applications. All units have been tested with MDC sources and are tuned for plug and play operation.

Features
  • Air Cooled
  • RS-232 / 422 / 485
  • CE Marked
  • Master / Slave Operation

R601 13.56MHz 600W RF Power Supply


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R601 13.56MHz 600W RF Power Supplies
Parameter Specifications
Frequency 13.56 MHz
Output Power 600 watts
Forward Power Metering + /-1% Full Scale, +/-1% Reading
Output Power Stability +/0.5% Long Term, +/-1%Watt
Harmonics -50 dBc
Input Power 95 – 125 VAC or 190 – 264 VAC, 47-63 Hz
Output Connector Type “N” Female
Interface Connectors Serial: DB-9 Female; Analog: DB-25 Female
Cooling Forced Air, 110 CFM (52 L/Sec.)
Dimensions 7 H x 9.5 W x 18.5 D (in.), 13.33 x 24.13 x 46.99 (cm)
Weight 33 lbs

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