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e-Vap XL Rotary Pocket Source

e-Vap® fixed pocket electron beam evaporation sources offer large material volume in a compact package. These sources are available in HV or UHV (VCR fitting) versions. These rugged high performance sources are perfect for a dedicated one material deposition process. These sources use the same advanced magnetic system utilized in our rotary source providing unmatched performance and reliability.

Features
  • Water cooled
  • 100cc x 3 pocket configuration
  • 40 to 75cc x 4 pocket configuration
  • 25 to 40cc x 6 pocket configuration
  • 400cc carousel pocket

e-Vap® XL Rotary Pocket Source


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e-Vap® XL Rotary Pocket Source
Parameter Specifications
Maximum Power 12kW - Crucible and material dependent
Operating Voltage -6kV to -10kV
Beam Current Zero to 1.5A
Water Flow 3.0 gpm @ 65 psi
XY sweep 0-200 Hz
Size 8.50″L x 6.87″W x 3.50″H
Weight 40 lbs
Vacuum High Vacuum version to: 2x10E-8 Torr UHV version: to 2x10E-11 Torr

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