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e-Vap 3kW Miniature Source

e-Vap® 3kW electron beam evaporation sources are the ideal choice for research systems. The crucible size is carefully matched to the 3kW power supply to allow temperatures high enough to evaporate virtually any materials including metals, oxides, and even refractory metals. The small footprint makes them easy to integrate into just about any chamber.

Features
  • Compact design
  • Water cooled
  • 2cc fixed pocket
  • Fits onto a 2.75 CF flange

e-Vap® 3kW Miniature Evaporation Source


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e-Vap® Miniature Frame Specifications
Parameter Specification
Maximum Power 3kW - Crucible and material dependent
Operating Voltage Approximate -5kV
Beam Current Zero to 600mA
Water Flow 0.62 gpm @ 65 psi
Mounting 2.75″ CF flange with HV and Water feedthroughs included
 Power Supply  16" W x 6" H x 12" L
Vacuum UHV to 2x10E-11 Torr

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