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Frame-2 - Large, Fixed Pocket



Specifications
Source Size Large
Source Type Fixed Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume Single-Pocket  75 & 100cc
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 50,000Å/min @15kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  200ºC
Materials UHV Compatible
Compatible Vacuum 2x10-11 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  6.60L x 5.50W x 2.25H
For conversion tables click here

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