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Product Listing

Frame-3 - Small, Rotary Pocket



Specifications
Source Size Small
Source Type Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket : 4x 6cc, 6x 3cc
Carousel :  360º, 15cc
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 1.5GPM and / or 65PSIG inlet-outlet differential
Dimensions  5.32L x 5.12W x 2.46H
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