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Miniature Evaporation System
e-Vap 3000 system

MDC’s 3kW Electron Beam Source is a versatile and economical deposition tool used for thin film coating processes in high and ultrahigh vacuum environments. The e-Vap® 3000 system evaporates virtually all rare earth refractory and dielectric materials. It provides researchers a simple, relatively low-cost means of depositing high purity thin film coatings. The source is manufactured using all metal sealed gaskets, is extremely compact and has a high level of ruggedness, reliability and efficiency. The compact source design allows the entire source assembly to fit through a 2.75" Del-Seal™ CF port opening and eliminates internal water and electrical connections. This 3kW source is available free standing or as a complete turnkey system. The filament/emitter assembly has a heat-sink and features a unique single piece high voltage insulator design. The entire emitter assembly slides out for easy maintenance. 

A new 3kW Switching Power Supply is available to drive these miniature sources. State-of-the-art switching technology renders a compact rack mountable power supply. The built-in source controller also employs switching technology and provides extremely accurate power control. MDC recommends using crucible liners with all e-Vap® evaporation sources. These liners offer improved thermal stability while reducing the transfer of heat to the crucible. Liners provide the ability to easily and quickly switch evaporant materials without removing the crucible for cleaning. They also reduce power requirements to achieve specific evaporation rates. For detailed list of crucible liner materials go to crucible liners.

e-Vap™ 3000 complete System

e-Vap™ 3000 Source Assembly

 
Source can be installed in a port with 2-3/4" Del-Seal™ CF flanges

Specifications
Metering  Digital Emission Current
Cooling Power Supply: Air cooled
Source: Watercooled
Input power 225 V ± 25 V, Single-phase,
50/60 Hz, 18 Amperes
Voltage output 5 kV DC negative polarity
Output Ripple  Less than 1% RMS
Voltage Regulation 0 .025%
Current output 0 to 0.6 Amperes
Emission Current Regulation  0.25%
Efficiency 85%
Weight  65lb
Dimensions 19" W x 10.5" H x 19" L

 

Features
  • 3kW Switching technology power supply
  • UHV compatible
  • 2.75" Del-Seal™ CF flange mount
  • Includes water and electrical connections
  • Evaporates refractory and dielectric materials
  • CE compliant

 
 e-Vap 100 system
For product listing, features and specifications click on links below
 All parts
 Complete System
 Source Assembly
 3000W Power Supply
 Filament Set, 5ea.
 Anode
 Beam Former
 Beam Former Insulator
 High Voltage Insulator
 Power Supply Spare Parts Kit
 

 Related Topics
 Deposition Rate Graphic for e-Vap 3000 System
 Typical e-Vap Installation
 Introduction to e-Vap 100 System Introduction
 Introduction to e-Vap Mighty Source Introduction

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