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Product > Thin Film Deposition > Modular Evaporation Systems
 
Thin Film Deposition
Modular Evaporation Systems - Individual Source
Frame 1- Small, Fixed PocketFrame-2 - Large, Fixed PocketFrame-3 - Small, Rotary Pocket
Frame-4 - Small, UHV Rotary PocketFrame-5 - Large, HV & UHV Rotary PocketFrame-6 - Extra Large, Rotary Pocket
Frame-6 Extra Large Rotary Pocket Thin Film Deposition Modular Evaporation Systems Individual Source



Specifications
Source Size Extra-Large
Source Type Rotary Pocket
Maximum Power 15kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket: 4x... 40, 60 & 75cc, 6x 25, 40cc
Carousel 360º 400cc
Combination Custom designs available
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 50,000Å/min @15kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  8.50L x 6.87W x 3.50H
For conversion tables click here

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There are 8 parts in this category. Scroll down to browse the result tables
For more details, available options and accessories click on desired Part Number link.

All "In Stock" parts ships same business day as ordered. Lead Time indicates business days. Please Note that cut off time for same day shipment is 1:30 p.m. Pacific Standard Time. Prices and specifications are subject to change without notice. See full terms of sale here.

Drawings download if available are indicated by in the Part Number column. Click on to go to Downloads Page

FRAME SIZESOURCE TYPECRUCIBLE GEOMETRYNUMBER OF POCKETSVOLUME PER POCKETDIRECT OR INDIRECT COOLINGMAX. POWERWT LBSPart NumberUOMList PriceNet PriceLead TimeQty
992405
REF# EV-4000-1540-HF
EACH---- Call 510-265-3500 ----
992400
REF# EV-4000-1560-HF
EACH---- Call 510-265-3500 ----
992406
REF# EV-4000-1575-HF
EACH---- Call 510-265-3500 ----
6ROTARYMULTI-POCKET640ccINDIRECT6kW40992674
REF# EV-6000-1540I-HF
EACH---- Call 510-265-3500 ----
6ROTARYMULTI-POCKET640ccDIRECT15kW40993100
REF # 6000-1540-HF LG PCKT CRUC
EACH---- Call 510-265-3500 ----
6ROTARYMULTI-POCKET625ccDIRECT15kW40992599
REF# EV-6000-1525-HF
EACH---- Call 510-265-3500 ----
6ROTARYCAROUSEL1400ccINDIRECT6kW40992720
REF# EV-4000-400-PANI-HF
EACH---- Call 510-265-3500 ----
6ROTARYCAROUSEL1400ccDIRECT15kW40993101
REF# EV-4000-400CAR-HF LG. PKT
EACH---- Call 510-265-3500 ----

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