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Product > Thin Film Deposition > Modular Evaporation Systems
 
Thin Film Deposition
Modular Evaporation Systems - Individual Source
Frame 1- Small, Fixed PocketFrame-2 - Large, Fixed PocketFrame-3 - Small, Rotary Pocket
Frame-4 - Small, UHV Rotary PocketFrame-5 - Large, HV & UHV Rotary PocketFrame-6 - Extra Large, Rotary Pocket
Frame-5 Large HV & UHV Rotary Pocket Thin Film Deposition Modular Evaporation Systems Individual Source



Specifications
Source Size Large
Source Type HV Rotary Pocket
Maximum Power 10kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket : 4x... 15, 25 & 30cc, 6x 12cc
Carousel 360º 150cc
Combination Custom designs available
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 30,000Å/min @10kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 3GPM and / or 65PSIG inlet-outlet differential
Dimensions  6.20L x 5.62W x 3.25H
For conversion tables click here

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There are 10 parts in this category. Scroll down to browse the result tables
 For more details, available options and accessories click on desired Part Number link.

All "In Stock" parts ships same business day as ordered. Lead Time indicates business days. Please Note that cut off time for same day shipment is 1:30 p.m. Pacific Standard Time. Prices and specifications are subject to change without notice. See full terms of sale here.

Drawings download if available are indicated by in the Part Number column. Click on to go to Downloads Page

FRAME SIZESOURCE TYPECRUCIBLE GEOMETRYNUMBER OF POCKETSVOLUME PER POCKETDIRECT OR INDIRECT COOLINGMAX. POWERWT LBSPart NumberUOMList PriceNet PriceLead TimeQty
5ROTARYMULTI-POCKET415ccDIRECT10kW27991900
REF# EV-4000-1015		EACH---- Call 510-265-3500 ----
5ROTARY UHVMULTI-POCKET415ccDIRECT6kW32992700
REF# EV-4000-1015UHV-HF		EACH---- Call 510-265-3500 ----
5ROTARYMULTI-POCKET425ccDIRECT10kW27991800
REF# EV-4000-1025-HF		EACH---- Call 510-265-3500 ----
992408
REF# EV-4000-1030-HF		EACH---- Call 510-265-3500 ----
5ROTARYMULTI-POCKET415ccINDIRECT6kW27992525
REF# EV-4000-615I-HF		EACH---- Call 510-265-3500 ----
5ROTARYMULTI-POCKET425ccINDIRECT6kW27992500
REF# EV-4000-625I-HF		EACH---- Call 510-265-3500 ----
5ROTARYMULTI-POCKET430ccINDIRECT6kW27992585
REF# EV-4000-630I-HF		EACH---- Call 510-265-3500 ----
5ROTARYCAROUSEL1150ccINDIRECT6kW27992502
REF# 4000-150CARI-HF		EACH---- Call 510-265-3500 ----
5ROTARYCAROUSEL1150ccDIRECT10kW27992523
REF# EV-4000-150CAR-HF		EACH---- Call 510-265-3500 ----
5ROTARYMULTI-POCKET612ccDIRECT10kW27992100
REF# EV-6000-1012-HF		EACH---- Call 510-265-3500 ----

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