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Product > Thin Film Deposition > Modular Evaporation Systems
 
Frame-3 Small Rotary Pocket Thin Film Deposition Modular Evaporation Systems Individual Source



Specifications
Source Size Small
Source Type Rotary Pocket
Maximum Power 6kW
Operating Voltage 6kV to 10kV
Filament 12VAC
Crucible Geometry / Volume  Multi-Pocket : 4x 6cc, 6x 3cc
Carousel :  360º, 15cc
X-Y Sweep Frequency  200Hz
Evaporation Rate of Aluminum 8,000Å/min @6kW with a source to
substrate distance of 250mm
Beam Spot Size 7mm
Crucible Material  OFE Copper
Bakeout Temperature  150ºC
Materials HV Compatible
Compatible Vacuum 2x10-8 Torr
Water Flow 1.5GPM and / or 65PSIG inlet-outlet differential
Dimensions  5.32L x 5.12W x 2.46H
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There are 2 parts in this category. Scroll down to browse the result tables
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All "In Stock" parts ships same business day as ordered. Lead Time indicates business days. Please Note that cut off time for same day shipment is 1:30 p.m. Pacific Standard Time. Prices and specifications are subject to change without notice. See full terms of sale here.

Drawings download if available are indicated by in the Part Number column. Click on to go to Downloads Page

FRAME SIZESOURCE TYPECRUCIBLE GEOMETRYNUMBER OF POCKETSVOLUME PER POCKETDIRECT OR INDIRECT COOLINGMAX. POWERWT LBSPart NumberUOMList PriceNet PriceLead TimeQty
3ROTARYMULTI-POCKET 446ccDIRECT6kW10991600
REF# EV-4000-66
EACH---- Call 510-265-3500 ----
3ROTARYMULTI-POCKET 663ccDIRECT6kW10992166
REF# EV-60000-603
EACH---- Call 510-265-3500 ----

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