Vertical Flange Mounted Source Thin Film Deposition Modular Evaporation Systems Assembly

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Thin Film Deposition
Modular Evaporation Systems - Vertical Source Assembly

Vertical Flange Mounted Source

Features
UHV compatible system 10.0" Del-Seal ™ CF flange mount Assembly includes rotary and electrical feedthroughs, clamps, linkages, water flow switch and water connections Shutter is fitted with a high temperature, 300ºC manual rotary drive Flange seal surface to crucible centerline is 6" standard Systems available with or without watercooled roofs

Description

MDC has eliminated the difficulties of flange mounting electron beam sources. The effort that goes into designing and fitting a source to a vacuum coating chamber has been done for you with the introduction of standard vertical flange mounted evaporation sources.

The flanged assembly includes one 7cc electron beam source with all water and electrical connections. This type of flange mounted system is typically installed vertically through the bottom side of a chamber. The compact footprint of these flanged evaporation systems requires only one port flange for installation. A popular option commonly ordered with these systems is a water-cooled roof, which mounts directly above the e-Vap ® source. The water-cooled roof acts as a heat barrier between the source and substrate and also prevents vapor condensation on chamber walls.

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For more details, available options and accessories click on desired Part Number link.

All "In Stock" parts ships same business day as ordered. Lead Time indicates business days. Please Note that cut off time for same day shipment is 1:30 p.m. Pacific Standard Time. Prices and specifications are subject to change without notice. See full terms of sale here.

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MOUNTING FLANGE

FRAME SIZE

SOURCE TYPE & VOLUME

COOLING ROOF

SOURCE NUMBER

WT LBS

Part Number

UOM

List Price

Net Price

Lead Time

Qty

10" DEL-SEAL

ONE POCKET 7cc

990598

992511
REF# EV-FMP-10V

EACH

---- Call 510-265-3500 ----

10" DEL-SEAL

ONE POCKET 7cc

YES

990598

992513

REF# EV-FMP-10RV

EACH

---- Call 510-265-3500 ----

Optional Accessories
Option -01	Pneumatic Shutter
	Shutters mask off the vapor stream between source and substrate. Shutters are ideal for pre-melt or “soak” prior to deposition by blanketing the evaporation material. Pneumatic shutters for vertical flanged assemblies cannot be mounted on source flange, but can be installed through a secondary 1.33" Del-Seal™ CF port. This shutter is a two position shutter which includes a 120VAC solenoid.
Option - 04	Custom Source Position
	Source position is the distance from the source face to mounting flange seal face. This dimension is standard at 6" for all vertical systems. Customer chamber layout or specifications may dictate a custom distance. Source positions between 6" and 10" are optional and available at the price listed bellow. Dimensions outside these limits must be quoted separately.
Option - 05	Custom Roof Ports
	Watercooled roofs have three ports. A main port directly over the source, which is used for the deposition process. A second port for the crystal sensor is used to monitor deposition rate. A third port provides direct visual inspection of the source and beam through a chamber viewport. Each of these port locations can be specified by the customer.
Option - 06 to -08	Custom Crucible Volume
	The standard volume for a single-pocket crucible is 7cc. For single pocket volumes of 15, 25 or 40cc add option -06, -07 or -08 respectively.
When ordering e-Vap® assembly options, please add the option number(s) to the end of the desired assembly Part Number listed above. For example 992511-01-04-05-08

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