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Product > Thin Film Deposition > Modular Evaporation Systems
 
Thin Film Deposition
Modular Evaporation Systems - Horizontal Source Assembly
Horizontal Flange Mounted Source
Horizontal Flange Mounted Source Thin Film Deposition Modular Evaporation Systems Assembly
Horizontal Flange Mounted Source Thin Film Deposition Modular Evaporation Systems Assembly
Features
  • UHV compatible system
  • 8" or 10" Del-Seal ™ CF flange mount
  • Assembly includes rotary, linear and electrical feedthroughs, clamps, linkages, water flow switch and water connections
  • Manual, push-pull shutter
  • High temperature, 300ºC manual rotary drive on 4 pocket models; blanked off on single pocket
  • Flange seal surface to crucible centerline is 8" on 8" Del-Sealº CF
  • Flange seal surface to crucible centerline is 10" on 10" Del-Sealº CF
  • Systems available with or without watercooled roofs

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There are 6 parts in this category. Scroll down to browse the result tables
 For more details, available options and accessories click on desired Part Number link.

All "In Stock" parts ships same business day as ordered. Lead Time indicates business days. Please Note that cut off time for same day shipment is 1:30 p.m. Pacific Standard Time. Prices and specifications are subject to change without notice. See full terms of sale here.

Drawings download if available are indicated by in the Part Number column. Click on to go to Downloads Page

MOUNTING FLANGEFRAME SIZESOURCE TYPE & VOLUMECOOLING ROOFSOURCE NUMBERWT LBSPart NumberUOMList PriceNet PriceLead TimeQty
10" DEL-SEAL4FOUR POCKET 6ccNO99170095992498
REF# EV-FMP-10HUHV		EACH---- Call 510-265-3500 ----
10" DEL-SEAL1ONE POCKET 7ccNO99059875992499
REF# EV-FMP-10H		EACH---- Call 510-265-3500 ----
8" DEL-SEAL1ONE POCKET 7ccNO99059850992515
REF# EV-FMP-8H		EACH---- Call 510-265-3500 ----
8" DEL-SEAL1ONE POCKET 7ccYES99059850992516
REF# EV-FMP-8RH		EACH---- Call 510-265-3500 ----
10" DEL-SEAL4FOUR POCKET 6ccYES99170095992540
REF# EV-10RHUHV		EACH---- Call 510-265-3500 ----
10" DEL-SEAL1ONE POCKET 7ccYES99059875992541
REF# EV-FMP-10RH		EACH---- Call 510-265-3500 ----

Optional Accessories

Option -01

  Pneumatic Shutter
vacuum Shutters mask off the vapor stream between source and substrate. Shutters are ideal for pre-melt or “soak” prior to deposition by blanketing the evaporation material. Pneumatic shutters for vertical flanged assemblies cannot be mounted on source flange, but can be installed through a secondary 1.33" Del-Seal™ CF port. This shutter is a two position shutter which includes a 120VAC solenoid.
Option - 02   Crucible Indexer Drive
vacuum

The Crucible Indexer is a stepper motor drive unit for rotating and positioning multi-pocket e-Vap® sources. The unit can drive sources with up to eight pockets in either a unidirectional or bidirectional manner. It can also drive continuous carousel-type sources at sixteen speed settings. Includes mounting bracket for external drive. 

Option - 03  Guide Rods
vacuum Two linear bearing guide rods allow the flange mounted e-Vap® systems to be routinely maintained by simply sliding in and out, in drawerlike fashion. A weldable support bracket kit is provided to secure the guide rods onto the user’s port flange. Installation is simple and self explanatory.
Option - 04 to -08  Custom Source Position & Volume

 		 The standard distance from the source center to the mounting-flange seal face is 10" or 8" for horizontal systems. For custom positions between 8" to 12" add option 4. Standard single- pocket crucible volume is 7cc. For pocket volumes of 15, 25 or 40cc add option -06, -07 or -08 respectively.
Option - 05  Custom Roof Ports
vacuum Watercooled roofs have three ports. A main port directly over the source, which is used for the deposition process. A second port for the crystal sensor is used to monitor deposition rate. A third port provides direct visual inspection of the source and beam through a chamber viewport. Each of these port locations can be specified by the customer. 
When ordering e-Vap® assembly options, please add the option number(s) to the end of the desired assembly Part Number listed above. For example 992515-01-02-03-04-05-08
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