- Chambers
- Electrical Feedthroughs
- Introduction
- Multipin Feedthroughs
- Coaxial Feedthroughs
- Thermocouple
- Power
- Introduction
- Low Power 500 to 5000V DC / to 15 Amps
- Medium Power 2500 to 5000V DC / to 30 Amps
- Medium Power 10,000V DC/ to 30 Amps
- High Power 20,000 to 100,000 DC to 150 Amps
- 20,000 Volts/ 15 Amps/ 1 Pin- Del Seal CF
- 20,000 Volts/ 15 Amps/ 1 Pin- Kwik Flange KF
- 20,000 Volts/ 15 Amps/ 1 Pin- Weldable
- 20,000 Volts/ to 150 Amps/ 1 Pin- Del Seal CF
- 20,000 Volts/ to 150 Amps/ 1 Pin- Kwik Flange KF
- 20,000 Volts/ to 150 Amps/ 1 Pin- Weldable
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Del Seal CF
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Kwik Flange KF
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Weldable
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Del Seal CF
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Kwik Flange KF
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Weldable
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin- Del Seal CF
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin Kwik Flange KF
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin- Weldable
- 45,000 to 100,000 Volts / 3 Amps/ 1 Pin- Del Seal CF
- 45,000 to 100,000 Volts / 3 Amps/ 1 Pin- Weldable
- High Power 3000 to 12,000V DC to 600 Amps
- Watered Cooled
- Power Connectivity
- 5000 Volts/25 Amps/ 1 to 4 Pins- Del Seal CF
- 5000 Volts/25 Amps/ 1 to 4 Pins- Kwik-Flange KF
- 5000 Volts/25 Amps/ 1 to 4 Pins- Weldable
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Del Seal CF
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Kwik-Flange KF
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Weldable
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Del Seal CF
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Kwik-Flange KF
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Weldable
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Del Seal CF
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Kwik-Flange KF
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Weldable
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Del-Based DB
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Powerboot Lockout
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Del Seal CF
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Kwik-Flange KF
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Weldable
- RF Power
- Breaks & Envelope
- Introduction
- Crynogenic & Liquid Breaks
- Vacuum Breaks
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Del Seal CF
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Kwik-Flange KF
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Weldable
- to 15,000 Volts, tube size 2 1/2" - 8"- Del Seal CF
- to 15,000 Volts, tube size 2 1/2" - 8"- Weldable
- Envelopes
- Connectors
- Wires & Insulators
- Flanges & Fittings
- Fluid Feedthroughs
- Foreline Traps
- Gas Delivery
- Glass Components
- Motion & Manipulation
- Pressure Relief
- Roughing Components
- Temperature Control
- Thin Film Deposition
- Vacuum Measurement
- Vacuum Pumps
- Valves
- Viewports
|
|
992511 -
MODEL# EV-FMP-10V
Part Item
992511
MODEL# EV-FMP-10V
Ref.Number:REF# EV-FMP-10V Get Quote |
|
|
|
---- Call 510-265-3500 ----
|
|
All "In Stock" parts ship same business day if ordered before 1:30pm PST. Availability indicates business days. Prices and specifications are subject to change without notice. See full terms of sale here.
| Optional Accessories |
|
Option -01
|
Pneumatic Shutter |
 |
Shutters mask off the vapor stream between source and substrate. Shutters are ideal for pre-melt or “soak” prior to deposition by blanketing the evaporation material. Pneumatic shutters for vertical flanged assemblies cannot be mounted on source flange, but can be installed through a secondary 1.33" Del-Seal™ CF port. This shutter is a two position shutter which includes a 120VAC solenoid. |
| Option - 04 |
Custom Source Position |
| |
Source position is the distance from the source face to mounting flange seal face. This dimension is standard at 6" for all vertical systems. Customer chamber layout or specifications may dictate a custom distance. Source positions between 6" and 10" are optional and available at the price listed bellow. Dimensions outside these limits must be quoted separately.
|
| Option - 05 |
Custom Roof Ports |
 |
Watercooled roofs have three ports. A main port directly over the source, which is used for the deposition process. A second port for the crystal sensor is used to monitor deposition rate. A third port provides direct visual inspection of the source and beam through a chamber viewport. Each of these port locations can be specified by the customer. |
| Option - 06 to -08 |
Custom Crucible Volume |
 |
The standard volume for a single-pocket crucible is 7cc. For single pocket volumes of 15, 25 or 40cc add option -06, -07 or -08 respectively.
|
| When ordering e-Vap® assembly options, please add the option number(s) to the end of the desired assembly Part Number listed above. For example 992511-01-04-05-08 |
|