Vertical Source Assembly

Modular Evaporation Sources
Vertical Source Assembly

MDC has eliminated the difficulties of flange mounting electron beam sources. The effort that goes into designing and fitting a source to a vacuum coating chamber has been done for you with the introduction of standard vertical flange mounted evaporation sources.

The flanged assembly includes one 7cc electron beam source with all water and electrical connections. This type of flange mounted system is typically installed vertically through the bottom side of a chamber. The compact footprint of these flanged evaporation systems requires only one port flange for installation. A popular option commonly ordered with these systems is a water-cooled roof, which mounts directly above the e-Vap® source. The water-cooled roof acts as a heat barrier between the source and substrate and also prevents vapor condensation on chamber walls.

Features

UHV compatible system
10.0" Del-Seal™ CF flange mount
Assembly includes rotary and electrical feedthroughs, clamps, linkages, water flow switch and water connections
Shutter is fitted with a high temperature, 300°C manual rotary drive
Flange seal surface to crucible centerline is 6" standard
Systems available with or without watercooled roofs

Vertical Source Assembly

For product listing, features and specifications click on links below

Vertical Source Assembly

Optional Accessories

Option-01

Pneumatic Shutter

Shutters mask off the vapor stream between source and substrate. Shutters are ideal for pre-melt or “soak” prior to deposition by blanketing the evaporation material. Pneumatic shutters for vertical flanged assemblies cannot be mounted on source flange, but can be installed through a secondary 1.33" Del-Seal™ CF port. This shutter is a two position shutter which includes a 120VAC solenoid.

Option-04

Custom Source Position

Source position is the distance from the source face to mounting flange seal face. This dimension is standard at 6" for all vertical systems. Customer chamber layout or specifications may dictate a custom distance. Source positions between 6" and 10" are optional and available at the price listed bellow. Dimensions outside these limits must be quoted separately.

Option-05

Custom Roof Ports

Option-06 to -08

Custom Crucible Volume

The standard volume for a single-pocket crucible is 7cc. For single pocket volumes of 15, 25 or 40cc add option -06, -07 or -08 respectively.

When ordering e-Vap® assembly options, please add the option number(s) to the end of the desired assembly Part Number listed above. For example 992515-01-02-03-04-05-08

Related Topics

Introduction to Individual Source

Introduction to Horizontal Flange Mount Assembly

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