- Chambers
- Electrical Feedthroughs
- Introduction
- Multipin Feedthroughs
- Coaxial Feedthroughs
- Thermocouple
- Power
- Introduction
- Low Power 500 to 5000V DC / to 15 Amps
- Medium Power 2500 to 5000V DC / to 30 Amps
- Medium Power 10,000V DC/ to 30 Amps
- High Power 20,000 to 100,000 DC to 150 Amps
- 20,000 Volts/ 15 Amps/ 1 Pin- Del Seal CF
- 20,000 Volts/ 15 Amps/ 1 Pin- Kwik Flange KF
- 20,000 Volts/ 15 Amps/ 1 Pin- Weldable
- 20,000 Volts/ to 150 Amps/ 1 Pin- Del Seal CF
- 20,000 Volts/ to 150 Amps/ 1 Pin- Kwik Flange KF
- 20,000 Volts/ to 150 Amps/ 1 Pin- Weldable
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Del Seal CF
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Kwik Flange KF
- 25,000 Volts / to 30 Amps/ 2 &3 Pins - Weldable
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Del Seal CF
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Kwik Flange KF
- 20,000 to 30,000 Volts / 1 Amp/1 Pin- Weldable
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin- Del Seal CF
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin Kwik Flange KF
- 30,000 to 40,000 Volts/ to 3 Amps/ 1 Pin- Weldable
- 45,000 to 100,000 Volts / 3 Amps/ 1 Pin- Del Seal CF
- 45,000 to 100,000 Volts / 3 Amps/ 1 Pin- Weldable
- High Power 3000 to 12,000V DC to 600 Amps
- Watered Cooled
- Power Connectivity
- 5000 Volts/25 Amps/ 1 to 4 Pins- Del Seal CF
- 5000 Volts/25 Amps/ 1 to 4 Pins- Kwik-Flange KF
- 5000 Volts/25 Amps/ 1 to 4 Pins- Weldable
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Del Seal CF
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Kwik-Flange KF
- 10,000 Volts/ 25 Amps/ 1 to 4 Pins- Weldable
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Del Seal CF
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Kwik-Flange KF
- 20,000 Volts / 25 Amps / 1 to 4 Pins- Weldable
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Del Seal CF
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Kwik-Flange KF
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Weldable
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Del-Based DB
- 15,000 Volts/ 70 Amps/1 & 2 Pins- Powerboot Lockout
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Del Seal CF
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Kwik-Flange KF
- 12,000 Volts/ 7.5 Amps/ 7 & 13Pins- Weldable
- RF Power
- Breaks & Envelope
- Introduction
- Crynogenic & Liquid Breaks
- Vacuum Breaks
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Del Seal CF
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Kwik-Flange KF
- to 15,000 Volts, tube size 3/4" - 1 1/2"- Weldable
- to 15,000 Volts, tube size 2 1/2" - 8"- Del Seal CF
- to 15,000 Volts, tube size 2 1/2" - 8"- Weldable
- Envelopes
- Connectors
- Wires & Insulators
- Flanges & Fittings
- Fluid Feedthroughs
- Foreline Traps
- Gas Delivery
- Glass Components
- Motion & Manipulation
- Pressure Relief
- Roughing Components
- Temperature Control
- Thin Film Deposition
- Vacuum Measurement
- Vacuum Pumps
- Valves
- Viewports
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Manipulation
Introduction
MDC’s V-Plane® modular stages are building block components designed to streamline
the implementation of a sample manipulation system. They can be used as
stand alone components or combined with other V-Plane® instruments to
attain customized motion and manipulation solutions. V-Plane® dual axis XY stages are
micrometer driven and guided by cross roller bearing slides. MDC micrometers have
unique laser etched plus-minus scales that indicate positive or negative port
displacement. V-Plane® single axis stages employ handwheel and worm gear reduction
drive mechanisms with linear displacement measured along the stage’s frame mounted
scale. Z axis linear travels of up to 36" are available. MDC V-Plane® stages provide
precise sample motion and manipulation of samples inside ultrahigh vacuum
environments. V-Plane® Z stages can also be fitted with guide tubes to further expand
their capabilities.
MDC guide tubes provide bellows support for V-Plane® manipulator stages fitted with longstroke
bellows as well as secondary rotary and linear motion feedthroughs installed on
the stage. Guide tubes mount directly onto VPlane ® manipulator stages fitted with 2-3/4"
Del-Seal™ CF port flanges with a bore clearance suitable for the 1.125" guide
tube diameter. They are supplied with both rotary and linear bearing supports. Rotary bearings
for .250" and .375" diameter shafts are included. For applications requiring sample
heating, cooling, high voltage biasing, thermocouple temperature measurements,
etc., the guide tube tip has been fitted with two slots 180° apart through which wires or
tubes can be fed. Four 1-1/3" and one 2-3/4" Del-Seal™ CF flange accessory ports
allow the installation of up to five additional accessory components. When a manipulator
stage is not under vacuum or is let up to air with the bellows in some
state of compression, the compressed bellows’ spring force may force the bellows to shift
off-axis at some point during its travel. The off-axis shift could be sudden and violent
causing user injury or damage to the bellows. MDC recommends that all longstroke
1.50" diameter bore Z axis V-Plane® stages, with linear travels exceeding six
inches, be fitted with guide tubes.
Rotatable axis stages replace conventional rotatable mounting tables previously offered
by MDC. They provide 360° positioning with greater precision, control and ease of use.
Rotatable stages are constructed with worm gear drive mechanisms which offer
substantial mechanical advantage over nongeared designs, a feature which allows
effortless manual operation, even under a full vacuum load. High torque stepper
motors are also available for these stages. MDC rotatable stages can be used to rotate heavy
samples or sample support apparatus and structures. Two spring energized PTFE face
seals are at the heart of the rotatable stage’s sealing mechanism. With provision for
differential pumping between the seals, these rotatable stages can be used in UHV
environments with bakeout temperatures as high as 200°C.
Standard XYZ stages are large bore stages which incorporate triple axis motion in a
single stage. The XY travels are micrometer driven and guided by cross roller bearing
slides. MDC micrometers have unique laser etched plus-minus scales that indicate
positive or negative port displacement and are available for 0.500" or 1.00" of linear XY
displacement. The Z axis employs a handwheel and worm gear reduction drive
mechanism with displacement measured along the stage’s frame mounted scale. Z
axis linear travels of up to 12" are available. MDC standard stages provide precise
sample motion and manipulation of samples inside ultrahigh vacuum environments.
Compact stages are small footprint single or triple axis stages and are ideally suited for
applications with limited space. They are available in a Z only or XYZ configuration.
They provide the means for precise sample manipulation inside ultrahigh
vacuum environments.
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Triple axis micrometer driven XYZ stage
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| Port Aligners |
| For product listing, features and specifications click on links below |
| Load-Lock Gimbal |
| Standard Gimbal |
| Off-Axis Precision |
| Off-Axis Heavy Duty |
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